Atomic force microscopy (AFM) is typically used for analysis of relatively flat surfaces with topographic features smaller than the height of the AFM tip. On flat surfaces, it is relatively easy to find the object of interest and deconvolute imaging artifacts resulting from the finite size of the AFM tip. In contrast, AFM imaging of three-dimensional objects much larger than the AFM tip height is rarely attempted although it could provide topographic information that is not readily available from two-dimensional imaging, such as scanning electron microscopy. In this paper, we report AFM measurements of a vertically-mounted razor blade, which is taller and sharper than the AFM tip. In this case, the AFM height data, except for the data collected around the cutting edge of the blade, reflect the shape of the AFM tip. The height data around the apex area are effectively the convolution of the AFM tip and the blade cutting edge. Based on computer simulations mimicking an AFM tip scanning across a round sample, a simple algorithm is proposed to deconvolute the AFM height data of an object taller and sharper than the AFM tip and estimate its effective curvature.

中文翻译：

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比 AFM 尖端更大、更锐利的物体的原子力显微镜 (AFM) 分析

原子力显微镜 (AFM) 通常用于分析相对平坦的表面，其地形特征小于 AFM 尖端的高度。在平坦的表面上，相对容易找到感兴趣的对象和去卷积由于 AFM 尖端的有限尺寸导致的成像伪影。相比之下，很少尝试对远大于 AFM 尖端高度的三维物体进行 AFM 成像，尽管它可以提供二维成像（例如扫描电子显微镜）不易获得的地形信息。在本文中，我们报告了垂直安装的剃须刀片的 AFM 测量结果，该刀片比 AFM 尖端更高、更锋利。在这种情况下，AFM 高度数据，除了在刀片切削刃周围收集的数据外，反映了 AFM 尖端的形状。顶点区域周围的高度数据实际上是 AFM 尖端和刀片切削刃的卷积。基于模拟 AFM 尖端扫描圆形样品的计算机模拟，提出了一种简单的算法来对比 AFM 尖端更高和更锐利的物体的 AFM 高度数据进行反卷积，并估计其有效曲率。