Atmospheric pressure plasmas have great potential, especially for biomedical applications, due to the large number of reactive species produced. In particular with regard to these applications, the comparability of processes through appropriate control of plasma parameters is essential for treatment safety. Here we present a method for the operando determination of absolute absorbed power in an RF atmospheric pressure helium plasma discharge using miniaturized probes. A detailed error analysis demonstrates the reliability of the measured power values. With the help of a global model, the sheath width and electron density (4 × 10 16 –11 × 10 16 m −3 ) are derived from these power measurements and compared to literature. The results and thus the validity of the electrical model are confirmed by a second, independent characterization method using optical emission spectroscopy and time-averaged imaging.

中文翻译：

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RF大气压氦等离子体射流中的耗散功率和电子密度

由于产生大量的反应物种，大气压等离子体具有巨大的潜力，特别是在生物医学应用中。特别是对于这些应用，通过适当控制血浆参数来实现过程的可比性对于治疗安全至关重要。在这里，我们介绍了一种使用小型化探针操作确定RF大气压氦等离子体放电中绝对吸收功率的方法。详细的误差分析证明了测得的功率值的可靠性。借助全局模型，可以从这些功率测量结果中得出鞘层宽度和电子密度（4×10 16 –11×10 16 m -3）并与文献进行比较。一秒钟就可以确认结果，从而确定电模型的有效性，