Nature Electronics ( IF 27.500 ) Pub Date : 2019-09-02 , DOI: 10.1038/s41928-019-0287-1 Xuge Fan, Fredrik Forsberg, Anderson D. Smith, Stephan Schröder, Stefan Wagner, Henrik Rödjegård, Andreas C. Fischer, Mikael Östling, Max C. Lemme, Frank Niklaus
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next-generation mobile, wearable and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring–mass and piezoresistive transducers. The transducers, which are created using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. With our devices, we also extract the Young’s modulus values of double-layer graphene and show that the graphene ribbons have significant built-in stresses.