Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next-generation mobile, wearable and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring–mass and piezoresistive transducers. The transducers, which are created using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. With our devices, we also extract the Young’s modulus values of double-layer graphene and show that the graphene ribbons have significant built-in stresses.

纳米机电系统（NEMS）传感器和执行器可用于开发下一代可移动，可穿戴和可植入设备。但是，这些NEMS设备需要超小型，灵敏且可以低成本制造的换能器。在这里，我们表明，悬挂的双层石墨烯碳带和附加的硅耐量块可以用作组合的弹簧-质量和压阻传感器。使用与大规模半导体制造技术兼容的工艺制造的换能器可产生NEMS加速度计，该加速度计的管芯面积比传统的最新硅加速度计小至少两个数量级。使用我们的设备，