Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper, we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.

可以通过用光学微机电系统（MEMS）装置代替较大的组件来使激光扫描显微镜小型化，以进行体内成像。多功能有源光学器件的出现可以支持进一步的微型化，而不是直接更换组件，因为这些有源器件可以使用更简单的光学系统设计实现衍射受限的性能。在本文中，我们提出了一种折反射显微镜物镜，该透镜具有集成的MEMS设备，可以执行双轴扫描，轴向焦点调整和球差控制。镜头中的MEMS架构在低数值孔径的后透镜组和非球面超半球面前折射元件之间集成了反射式MEMS扫描仪，以支持高数值孔径成像。我们使用最近开发的混合聚合物/硅MEMS三维扫描镜实现了这个新的光学系统，该三维扫描镜具有环形孔，可在不需要分束器的情况下在物镜内同轴对准。通过基于新物镜设计的共聚焦显微镜，对主动折反射系统的光学性能进行了仿真，并对硬目标和人颊细胞进行了成像。