High-throughput combinatorial investigations are transforming materials discovery, phase diagram development, and processing optimization. Thin-film deposition techniques are frequently used to fabricate sample libraries employed in these studies. Various adaptations of well-known thin-film chemical vapor deposition (CVD) and physical vapor deposition (PVD) techniques utilized for the synthesis of inorganic combinatorial thin-film materials libraries are reviewed, with novel processing approaches being highlighted. Methods for developing gradients in composition of other film properties are described. Issues and considerations specific to thin-film processing of combinatorial materials libraries are discussed, with some emphasis on catalytic applications.

中文翻译：

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组合材料研究的薄膜加工路线-综述。

高通量组合研究正在转变材料发现，相图开发和工艺优化。薄膜沉积技术通常用于制造这些研究中使用的样品库。综述了用于合成无机组合薄膜材料库的众所周知的薄膜化学气相沉积（CVD）和物理气相沉积（PVD）技术的各种改编，并着重介绍了新颖的处理方法。描述了用于形成其他膜性质的组成中的梯度的方法。讨论了组合材料库的薄膜处理所特有的问题和注意事项，其中有些侧重于催化应用。