In this work, the stereometric 3-D surface topography as well as the optical properties of the Al doped ZnO (AZO), and Al/ Cu co-doped ZnO (CAZO) thin films were investigated. These films were deposited with different thicknesses of 50 and 150 nm. The effect of dopants (Al, Cu) and sputtering parameters on the microstructures, crystalline structures, and fractal features were probed by Atomic Force Microscopy (AFM), X-ray diffraction, and Rutherford back scattering. AFM analysis of 3-D surface texture provided a deeper insight into their characteristics and implementation in graphical models and computer simulation. Studying surface roughness of samples at nanometer scale revealed a fractal structure which confirmed the relationship between the value of the fractal dimension and surface roughness parameters. Moreover, the optical properties of AZO and CAZO thin films and the relationship between their optical band gaps and their varied thicknesses were evaluated by Ultraviolet–visible spectrophotometry.

在这项工作中，研究了Al-掺杂的ZnO（AZO）和Al / Cu共掺杂的ZnO（CAZO）薄膜的立体3-D表面形貌以及光学性质。这些膜以50和150 nm的不同厚度沉积。通过原子力显微镜（AFM），X射线衍射和卢瑟福反散射来探测掺杂剂（Al，Cu）和溅射参数对微观结构，晶体结构和分形特征的影响。对3D表面纹理的AFM分析提供了对它们的特性和在图形模型和计算机仿真中的实现的更深入的了解。在纳米尺度上研究样品的表面粗糙度揭示了一种分形结构，该分形结构证实了分形维数的值与表面粗糙度参数之间的关系。而且，