Abstract In this paper the results of structural analysis of the SnO 2 and In 2 O 3 films deposited by spray pyrolysis are presented. The main goals of this analysis are summarizing the results obtained in this field, highlighting a correlation between parameters of film deposition and the material structure and formulating some general regularities, typical for metal oxides. Peculiarities and mechanisms of pyrosol deposition as well as advantages and disadvantages of this technology for deposition of the films with required parameters were also discussed. It is shown that this technology has great potential for controlling structural parameters of metal oxides such as thickness, the grain size, texturing, roughness, the grain faceting and the porosity.

中文翻译：

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未掺杂 SnO2 和 In2O3 薄膜的喷雾热解沉积及其结构特性

摘要 本文介绍了喷雾热解法沉积的SnO 2 和In 2 O 3 薄膜的结构分析结果。该分析的主要目标是总结在该领域获得的结果，强调薄膜沉积参数与材料结构之间的相关性，并制定一些一般规律，典型的金属氧化物。还讨论了热溶胶沉积的特性和机制，以及该技术在沉积具有所需参数的薄膜方面的优缺点。结果表明，该技术在控制金属氧化物的结构参数方面具有巨大潜力，例如厚度、晶粒尺寸、纹理、粗糙度、晶粒面和孔隙率。