Membrane-Based NEMS/MEMS Biosensors,ACS Applied Electronic Materials

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Membrane-Based NEMS/MEMS Biosensors
ACS Applied Electronic Materials ( IF 4.3 ) Pub Date : 2024-04-05 , DOI: 10.1021/acsaelm.3c01732
Hannes Stapf ₁ , Franz Selbmann _{1,

2} , Yvonne Joseph _{1,

3} , Parvaneh Rahimi _{1,

3}

Affiliation

Membrane-based nano/microelectromechanical system (NEMS/MEMS) biosensors offer sustainable, cost-effective, ultraminiaturized and easy-to-use analytical techniques for various applications, especially in the environmental and biomedical/pharmaceutical fields. Compared to cantilever-based MEMS/NEMS biosensors, membrane-based MEMS/NEMS biosensors have higher sensitivity, especially for liquid samples, as the back of the membrane is not in contact with the analyte solution, resulting in a higher signal-to-noise ratio. This review provides deep insight into the fundamentals, membrane materials, different biosensing designs, as well as various transducers used in membrane-based MEMS/NEMS biosensors. The performance of the developed membrane-based MEMS/NEMS biosensors is critically discussed, and their trends and challenges are highlighted. Among the reported biosensors, capacitive-based surface stress biosensors and capacitive micromachined ultrasonic transducer (CMUT) biosensors are emerging as sophisticated and sensitive platforms for biosensing with the ability to detect multiple targets simultaneously. Nevertheless, challenges remain in biosensor design, parameter optimization, and selection of appropriate membrane materials. Further research is imperative to improve the capabilities of these biosensors, particularly in advancing array technologies for the simultaneous detection of multiple analytes.

中文翻译：

基于膜的 NEMS/MEMS 生物传感器

基于膜的纳米/微机电系统（NEMS/MEMS）生物传感器为各种应用提供可持续、经济高效、超小型化且易于使用的分析技术，特别是在环境和生物医学/制药领域。与基于悬臂梁的 MEMS/NEMS 生物传感器相比，基于膜的 MEMS/NEMS 生物传感器具有更高的灵敏度，特别是对于液体样品，因为膜的背面不与分析物溶液接触，从而导致更高的信噪比比率。这篇综述深入了解了基本原理、膜材料、不同的生物传感设计以及基于膜的 MEMS/NEMS 生物传感器中使用的各种传感器。对所开发的基于膜的 MEMS/NEMS 生物传感器的性能进行了批判性讨论，并强调了它们的趋势和挑战。在已报道的生物传感器中，基于电容的表面应力生物传感器和电容微机械超声换能器（CMUT）生物传感器正在成为复杂而灵敏的生物传感平台，能够同时检测多个目标。然而，生物传感器设计、参数优化和合适膜材料的选择仍然存在挑战。必须进行进一步的研究来提高这些生物传感器的能力，特别是在先进的同时检测多种分析物的阵列技术方面。

更新日期：2024-04-05

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