We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either a light emitting diode or a photodetector directly connected to the MIM waveguides. We experimentally verify the independent and combined operations of electrically-driven on-chip light sources and photodetectors.

中文翻译：

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金属-绝缘体-金属波导平台中的异质集成发光二极管和光电探测器

我们展示了将有源半导体材料异质集成到传统的无源金属-绝缘体-金属 (MIM) 波导中，为芯片级有源纳米光子平台提供紧凑的片上光生成和检测能力。根据其偏置条件，金属-半导体-金属部分可以用作直接连接到 MIM 波导的发光二极管或光电探测器。我们通过实验验证了电驱动片上光源和光电探测器的独立和组合操作。