Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hindered their mass production. Here we demonstrate low-cost and high-throughput mass production of large-aperture visible metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography. Once a 12″ master stamp is imprinted, hundreds of centimetre-scale metalenses can be fabricated using a thinly coated high-index film to enhance light confinement, resulting in a substantial increase in conversion efficiency. As a proof of concept, an ultrathin virtual reality device created with the printed metalens demonstrates its potential towards the scalable manufacturing of metaphotonic devices.

由于超透镜具有出色的光调制性能和亚微米级厚度，因此是传统笨重折射透镜的有吸引力的替代品；然而，现有制造技术的局限性，包括高成本、低产量和小图案区域，阻碍了它们的大规模生产。在这里，我们展示了使用深紫外氩氟浸没光刻和晶圆级纳米压印光刻以低成本和高通量大规模生产大孔径可见超透镜。一旦压印了 12 英寸的主印章，就可以使用薄涂层高折射率薄膜制造数百厘米级的超透镜，以增强光限制，从而显着提高转换效率。作为概念证明，