Micro/nanostructured surfaces have wide applications in optics, electronics, and aerospace. However, the current fast tool servo (FTS) cannot satisfy the large demand for micro/nanostructured surfaces in the industry, because their low working frequency influences the machining efficiency. To solve this problem, this paper develops a novel FTS with the high working frequency. To improve the working frequency, a topology optimization algorithm is proposed to design its mechanical structure. Then, the numerical models of the FTS, including the input stiffness, amplification ratio, natural frequency, and maximum stress, are established to analyze its specifications. Performance tests show that the stroke and maximal working frequency of the developed FTS are 15 μm and 1250 Hz, demonstrating superior performance. Besides, to improve motion accuracy, a closed-loop control system is designed based on the proportional-integral controller and feed-forward compensation methods. Experimental results show that errors of motion trajectories in three cases are lower than ± 50 nm, demonstrating the ultrahigh motion accuracy of the developed FTS. Therefore, this research develops a new FTS, which not only has a high working frequency but also has an ultrahigh motion accuracy.

微/纳米结构表面在光学、电子和航空航天领域具有广泛的应用。然而，目前的快速刀具伺服（FTS）不能满足工业上对微/纳米结构表面的大量需求，因为它们的低工作频率影响了加工效率。为了解决这个问题，本文开发了一种具有高工作频率的新型 FTS。为了提高工作频率，提出了一种拓扑优化算法来设计其机械结构。然后，建立了 FTS 的数值模型，包括输入刚度、放大比、固有频率和最大应力，以分析其规范。性能测试表明，开发的FTS行程和最大工作频率分别为15 μm和1250 Hz，表现出优越的性能。此外，为了提高运动精度，基于比例积分控制器和前馈补偿方法设计了闭环控制系统。实验结果表明，三种情况下的运动轨迹误差均低于±50 nm，证明了所开发的FTS的超高运动精度。因此，本研究开发了一种新型的FTS，它不仅具有高工作频率，而且具有超高的运动精度。