We have designed a gripper for scanning microwave microscopy (SMM) based on atomic force microscopy, which is optimized for impedance-matching structures and high-frequency microwave loss. The gripper is simple in construction and highly integrated. The return loss near the target operating frequency of 20 GHz is less than −30 dB. The minimum detected power reach −40 dBm with the order of nW. The microwave scanning image of the sample surface structure was experimentally tested, showing that the gripper can be applied to microwave scanning imaging. The research results have contributed to the development of SMM.

中文翻译：

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高频低损耗集成扫描微波探头夹持器设计

我们基于原子力显微镜设计了一种用于扫描微波显微镜 (SMM) 的夹持器，该夹持器针对阻抗匹配结构和高频微波损耗进行了优化。该抓手结构简单，集成度高。目标工作频率 20 GHz 附近的回波损耗小于 −30 dB。最小检测功率达到-40 dBm，数量级为nW。实验测试了样品表面结构的微波扫描图像，表明该夹持器可应用于微波扫描成像。研究成果为SMM的发展做出了贡献。