Miniature piezoelectric robots exhibit superior performances and have been favored by many researchers, however, there is an intractable contradiction between nano-resolution and fast speed. Inspired by motion of quadrupeds, we proposed a miniature quadruped piezoelectric robot (MQPR), which combined quasi-static motion and resonant motion to realize nano-resolution and high speed, respectively. Two theoretical models were established to determine the parameters of the proposed piezo-leg, and they were verified by experiments. A prototype with size of 35 × 44 × 12 mm³ and weight of 21.0 g was manufactured and tested. The measured results showed that the MQPR realized multi-DOF motions with resolution of less than 8.8 nm and range of about 2 μm in quasi-static motion, and achieved a linear speed of 393.5 mm/s (11.2 BL/s) and a rotational speed of 246.5 °/s in resonant motion. Moreover, a resolution of 0.31 μm was obtained by resonant motion in pulse mode, which could achieve effective cooperation of the above two motion mechanisms. In addition, the load capacity of the MQPR was 100 g, which was about 5 times its own weight. These characteristics help the MQPR have great potential to efficiently perform precision manipulations at multiple target locations over a large area, such as detection of circuit board in large integrated circuits or wafers.

微型压电机器人表现出优越的性能，受到众多研究者的青睐，但纳米分辨率与快速速度之间存在着难以解决的矛盾。受四足运动的启发，我们提出了一种微型四足压电机器人（MQPR），它结合了准静态运动和共振运动，分别实现了纳米级分辨率和高速运动。建立了两个理论模型来确定所提出的压电腿的参数，并通过实验对其进行了验证。尺寸为 35 × 44 × 12 mm ^3的原型制造和测试的重量为 21.0 g。实测结果表明，MQPR在准静态运动中实现了分辨率小于8.8 nm、范围约2 μm的多自由度运动，实现了393.5 mm/s（11.2 BL/s）的线速度和旋转速度。共振运动速度为 246.5 °/s。此外，通过脉冲模式的共振运动获得了0.31 μm的分辨率，可以实现上述两种运动机制的有效配合。此外，MQPR 的负载能力为 100 g，约为自身重量的 5 倍。这些特性帮助 MQPR 具有巨大的潜力，可以在大面积的多个目标位置高效地执行精确操作，例如检测大型集成电路或晶圆中的电路板。