Biosensing with Silicon Nitride Microring Resonators Integrated with an On-Chip Filter Bank Spectrometer,ACS Sensors

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Biosensing with Silicon Nitride Microring Resonators Integrated with an On-Chip Filter Bank Spectrometer
ACS Sensors ( IF 8.2 ) Pub Date : 2023-02-14 , DOI: 10.1021/acssensors.2c02276
Michael R Bryan _{1,

2} , Jordan N Butt ₃ , Joseph Bucukovski ₂ , Benjamin L Miller _{1,

2,

4}

Affiliation

Wearable, mobile, and point-of-care (POC) sensors comprise a rapidly expanding field of devices aimed at improving human health by relaying real-time biometric data such as heart rate and glucose levels. The current scope of what these devices can offer healthcare is limited by their inability to measure biomarkers associated with inflammation, well-being, and disease. Photonic biosensors that integrate sensing elements directly with spectrometers, lasers, and detectors are an attractive approach to enabling POC sensors, with distinct advantages in terms of size, weight, power consumption, and cost. Here, we have demonstrated for the first time the integration of photonic microring resonator biosensors with an on-chip microring filter bank spectrometer for the controlled detection of inflammatory biomarker C-reactive protein (CRP) in serum. We demonstrate that sensor and spectrometer performance is tolerant of temperature variation, as temperature dependence moves in parallel. Finally, we assess the impact of manufacturing variability on the 300 mm wafer scale on the performance of the spectrometer. Taken together, these results suggest that integration of on-chip ring filter bank spectrometers with ring resonator-based biosensors constitutes an attractive approach toward cost-effective integrated sensor development.

中文翻译：

使用集成了片上滤波器组光谱仪的氮化硅微环谐振器进行生物传感

可穿戴、移动和床旁 (POC) 传感器组成了一个快速扩展的设备领域，旨在通过中继心率和血糖水平等实时生物识别数据来改善人类健康。这些设备目前可以提供的医疗保健范围受到它们无法测量与炎症、健康和疾病相关的生物标志物的限制。将传感元件与光谱仪、激光器和检测器直接集成的光子生物传感器是实现 POC 传感器的一种有吸引力的方法，在尺寸、重量、功耗和成本方面具有明显优势。在这里，我们首次展示了光子微环谐振器生物传感器与片上微环滤波器组光谱仪的集成，用于控制检测血清中的炎症生物标志物 C 反应蛋白 (CRP)。我们证明传感器和光谱仪的性能可以容忍温度变化，因为温度依赖性是平行移动的。最后，我们评估了 300 毫米晶圆规模的制造可变性对光谱仪性能的影响。综上所述，这些结果表明，片上环形滤波器组光谱仪与基于环形谐振器的生物传感器的集成构成了一种具有成本效益的集成传感器开发的有吸引力的方法。

更新日期：2023-02-14

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