Dual-phase Zr-based thin films synthesized by magnetron co-sputtering and showing competitive growth between amorphous and crystalline phases have been reported recently. In such films, the amorphous phase grows as columns, while the crystalline phase grows as separated cone-shaped crystalline regions made of smaller crystallites. In this paper, we investigate this phenomenon and propose a model for the development of the crystalline regions during thin film growth. We evidence using X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM), that this competitive self-separation also exists in co-sputtered Zr-Cr thin films with Cr contents of ∼84–86 at%, corresponding to the transition between the amorphous and crystalline compositions, and in the Zr-V system. Then, to assess the sturdiness of this phenomenon, its existence and geometrical characteristics are evaluated when varying the film composition and the deposition rate. The variation of geometrical features, such as the crystalline cone angle, the size and density of crystallites, is discussed. Is it shown that a variation in the deposition rate changes the nucleation and growth kinetics of the crystallites. The surface coverage by the crystalline phase at a given thickness is also calculated for each deposition rate. Moreover, comparison is made between Zr-Cr, Zr-V, Zr-Mo and Zr-W dual-phase thin films to compare their nucleation and growth kinetics.

最近报道了通过磁控管共溅射合成的双相 Zr 基薄膜，并显示出非晶相和晶相之间的竞争生长。在这样的薄膜中，非晶相生长为柱状，而结晶相生长为由较小的微晶组成的分离的锥形结晶区域。在本文中，我们研究了这种现象并提出了薄膜生长过程中结晶区域发展的模型。我们使用 X 射线衍射 (XRD)、扫描电子显微镜 (SEM) 和透射电子显微镜 (TEM) 证明，这种竞争性自分离也存在于 Cr 含量为～84–86 的共溅射 Zr-Cr 薄膜中at%，对应于非晶和结晶成分之间的转变，以及 Zr-V 系统。然后，为了评估这种现象的坚固性，在改变薄膜成分和沉积速率时评估它的存在和几何特征。讨论了几何特征的变化，例如结晶锥角、微晶的尺寸和密度。是否表明沉积速率的变化会改变微晶的成核和生长动力学。还针对每个沉积速率计算给定厚度的结晶相的表面覆盖率。此外，比较了Zr-Cr、Zr-V、Zr-Mo和Zr-W双相薄膜，比较了它们的成核和生长动力学。讨论了微晶的尺寸和密度。是否表明沉积速率的变化会改变微晶的成核和生长动力学。还针对每个沉积速率计算给定厚度的结晶相的表面覆盖率。此外，比较了Zr-Cr、Zr-V、Zr-Mo和Zr-W双相薄膜，比较了它们的成核和生长动力学。讨论了微晶的尺寸和密度。是否表明沉积速率的变化会改变微晶的成核和生长动力学。还针对每个沉积速率计算给定厚度的结晶相的表面覆盖率。此外，比较了Zr-Cr、Zr-V、Zr-Mo和Zr-W双相薄膜，比较了它们的成核和生长动力学。