The (Mo-Ta-W)-C and (Nb-Ta-W)-C carbide thin films were prepared by non-reactive magnetron co-sputtering. The (Mo-Ta-W)-C thin films exhibited the simple BCC structure with the strip-like surface morphologies and a double-layer structure for cross sections with a columnar upper layer and an featureless lower layer. In the (Mo-Ta-W)-C thin films, the metal-metal and metal-oxygen bonds were observed with no metal-carbon bonds. The carbon-carbon bonds were observed, indicating free carbon phases existed in the (Mo-Ta-W)-C thin films. The surface roughness of (Mo-Ta-W)-C thin films was small with R_a value of 3.11–3.74 nm. The hardness of (Mo-Ta-W)-C thin films was 32.6–33.5 GPa. The (Nb-Ta-W)-C thin films formed the amorphous structure. Different from (Mo-Ta-W)-C thin films, the metal-carbon bonds existed in the (Nb-Ta-W)-C thin films, except the metal-metal and metal-oxygen bonds. The C-C bonds were also observed, indicating free carbon phases existed in the (Nb-Ta-W)-C thin films. The surfaces of (Nb-Ta-W)-C thin films displayed a granular structure with Ra of 0.86–1.00 nm, and the cross sections exhibited a fine fibrous structure. The hardness values of (Nb-Ta-W)-C thin films ranged from 34.5 to 36.1 GPa with elastic modulus of 319.6–349.5 GPa. The corrosion current density and polarization resistance of (Nb-Ta-W)-C thin films were better than 304 stainless steel, indicating good anti-corrosive performance of (Nb-Ta-W)-C thin films. The (Nb₂₃Ta₂₁W₂₃)C₃₃ thin film had low reflectivity in the visible light band (300–800 nm), and high reflectivity in the near-infrared band (800–2500 nm), with the solar absorption ratio α_s of 0.4577 and the infrared emissivity ε_H of 0.178.

(Mo-Ta-W)-C和(Nb-Ta-W)-C碳化物薄膜采用非反应磁控共溅射制备。(Mo-Ta-W)-C 薄膜具有简单的 BCC 结构，表面形貌呈条状，横截面为柱状上层和无特征下层的双层结构。在 (Mo-Ta-W)-C 薄膜中，观察到金属-金属和金属-氧键，没有金属-碳键。观察到碳-碳键，表明在 (Mo-Ta-W)-C 薄膜中存在游离碳相。(Mo-Ta-W)-C薄膜的表面粗糙度较小，R _a值为 3.11–3.74 nm。(Mo-Ta-W)-C 薄膜的硬度为 32.6–33.5 GPa。(Nb-Ta-W)-C薄膜形成非晶结构。与(Mo-Ta-W)-C薄膜不同的是，(Nb-Ta-W)-C薄膜中除了金属-金属键和金属-氧键外，还存在金属-碳键。还观察到 CC 键，表明 (Nb-Ta-W)-C 薄膜中存在游离碳相。(Nb-Ta-W)-C薄膜表面呈粒状结构，Ra为0.86~1.00 nm，横截面呈细纤维状结构。(Nb-Ta-W)-C 薄膜的硬度值范围为 34.5 至 36.1 GPa，弹性模量为 319.6-349.5 GPa。(Nb-Ta-W)-C薄膜的腐蚀电流密度和极化电阻均优于304不锈钢，表明(Nb-Ta-W)-C薄膜具有良好的耐腐蚀性能。₂₃ Ta ₂₁ W ₂₃ )C ₃₃薄膜在可见光波段（300~800 nm）具有低反射率，在近红外波段（800~2500 nm）具有高反射率，太阳能吸收比_αs为0.4577红外发射率ε _H为0.178。