ABSTRACT

Thermoelectric (TE) technology enables direct conversion between thermal and electrical energies and thus has been regarded as an alternative for energy harvesting and refrigeration. Bismuth telluride (Bi₂Te₃) is the most widely used TE material at room temperature due to its high figure of merit (∼1). Since the first publication on the electrodeposition of Bi₂Te₃ films in 1994, a large number of publications has emerged in the last two decades, owing to its advantages such as simple and safe preparation, high deposition rate, convenient micromachining, good compatibility to semiconductor microfabrication techniques and so on. This article reviews the recent research progress in the electrodeposition of Bi₂Te₃ and its application in TE devices. Additionally, an outlook towards the future development of this area has also been discussed.

摘要

热电 (TE) 技术可实现热能和电能之间的直接转换，因此被视为能量收集和制冷的替代方案。由于其高品质因数 (∼1)，碲化铋 (Bi ₂ Te _{3 ) 是室温下使用最广泛的 TE 材料。}自 1994 年首次发表关于 Bi ₂ Te ₃薄膜电沉积的论文以来，由于其制备简单安全，沉积速率高，微加工方便，与半导体微细加工技术等。本文综述了Bi _{2电沉积的最新研究进展}Te ₃及其在TE器件中的应用。此外，还讨论了对该领域未来发展的展望。