Light addressable potentiometric sensor (LAPS) with the structure of electrolyte-insulator-semiconductor is a kind of field effect sensor that detects local potential changes caused by protonation and deprotonation between electrolyte and insulator by light pulse. And scanned light pulse allows two-dimensional imaging of the distribution of chemical/biological species on the surface of sensor. An important challenge is to achieve low-cost, strong anti-interference and high-performance silicon-based LAPS. In this study, we propose to combine microsphere lithography with wet etching to fabricate well-ordered, tunable and low-cost pyramidal pits-patterned silicon as semiconductor of LAPS. The morphology and optical properties of pyramidal pits-patterned silicon are tested and analyzed. The sensing characteristics and the pH imaging performance of LAPS are tested and evaluated. The experiment results and theoretical analyses show that LAPS with pyramidal pits-patterned silicon has acceptable pH response, good long-term stability, and high performance in terms of photocurrent enhancement ratio, signal-to-noise ratio and pH imaging. This work can provide a simple, low-cost, strong anti-interference and high-performance device for pH-related chemical/biological analysis.

光可寻址电位传感器（LAPS）具有电解质-绝缘体-半导体结构，是一种利用光脉冲检测电解质与绝缘体之间质子化和去质子化引起的局部电位变化的场效应传感器。扫描光脉冲允许对传感器表面上的化学/生物物种分布进行二维成像。一个重要的挑战是实现低成本、强抗干扰和高性能的硅基LAPS。在这项研究中，我们建议将微球光刻与湿法蚀刻相结合，以制造有序、可调和低成本的金字塔形凹坑图案硅作为 LAPS 半导体。对金字塔形凹坑图案化硅的形貌和光学特性进行了测试和分析。对LAPS的传感特性和pH成像性能进行了测试和评估。实验结果和理论分析表明，具有金字塔形凹坑图案硅的 LAPS 具有可接受的 pH 响应、良好的长期稳定性，以及在光电流增强比、信噪比和 pH 成像方面的高性能。该工作可为pH相关化学/生物分析提供一种简单、低成本、抗干扰性强的高性能装置。