Global existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deformable plate according with experimental setups has been assigned, some technical conditions of applicability for the intended use of the device as well as the mechanical tension of the deformable plate are presented and discussed. Then, highlighting the link between the fringing field and the electrostatic force, finite differences were exploited for recovering the deformable plate profile according both global existence and uniqueness conditions. Moreover, the influence of the electro-mechanical properties of the deformable plate on both the numerical approach and on the intended uses of the device is discussed, comparing the results with experimental setups regarding pull-in voltage and electrostatic pressure.

中文翻译：

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具有边缘场的静电 MEMS 中板轮廓恢复的有限差分

作者最近实现了具有平行板和边缘场贡献的静电弹性 MEMS 器件的无量纲四阶积分微分模型的全局存在和唯一性条件。从这项工作开始，一旦根据实验设置分配了可变形板的介电轮廓，就会介绍和讨论适用于设备预期用途的一些技术条件以及可变形板的机械张力。然后，强调边缘场和静电力之间的联系，利用有限差分来根据全局存在性和唯一性条件恢复可变形板的轮廓。而且，