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Noise analysis of mode matched vibratory gyroscopes
Microsystem Technologies ( IF 1.6 ) Pub Date : 2022-09-12 , DOI: 10.1007/s00542-022-05365-x
Hakan Cetin , Goksenin Yaralioglu

MEMS (micro-electromechanical system) vibratory gyroscopes have attracted a lot of interest recently and these gyroscopes made their way through portable devices and smart phones. However, their performance is not enough to cope with the demanding requirements of applications such as dead reckoning. Mode-matched gyroscopes can be a solution for this problem. Various mode-matched gyroscope architectures have been proposed and their noise performances have been analyzed in detail. However, in most of these analyses zero-rate output was considered and the noise analysis for dynamic cases were ignored. In this paper, we demonstrate the noise analysis of mode-matched vibratory gyroscope using the power spectral density (PSD) and the Allan deviation methods while in rotation. We show that for mode-matched gyros the noise performance of a rotating gyro can be significantly different from that of a gyro that does not experience any rotation. We also show that this difference is due to the coupling between the drive and sense systems via Coriolis force. This sets a fundamental limit for the noise performance of mode-matched vibratory gyroscopes where ARW (angle random walk) increases proportionally with the rotation rate for the open loop and the force to rebalance operation modes.



中文翻译:

模式匹配振动陀螺仪的噪声分析

MEMS(微机电系统)振动陀螺仪最近引起了很多兴趣,这些陀螺仪在便携式设备和智能手机中大行其道。然而,它们的性能不足以应对航位推算等应用的苛刻要求。模式匹配的陀螺仪可以解决这个问题。已经提出了各种模式匹配的陀螺仪架构,并详细分析了它们的噪声性能。然而,在大多数这些分析中,都考虑了零速率输出,而忽略了动态情况下的噪声分析。在本文中,我们演示了模式匹配振动陀螺仪在旋转时使用功率谱密度 (PSD) 和艾伦偏差方法进行的噪声分析。我们表明,对于模式匹配的陀螺仪,旋转陀螺仪的噪声性能可能与不经历任何旋转的陀螺仪的噪声性能显着不同。我们还表明,这种差异是由于驱动系统和传感系统之间通过科里奥利力耦合造成的。这为模式匹配振动陀螺仪的噪声性能设定了一个基本限制,其中 ARW(角度随机游走)与开环的旋转速率和重新平衡操作模式的力成比例增加。

更新日期:2022-09-13
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