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Features of the Operation of a Three-Electrode Electrostatic Microgenerator in the Presence of Collisions between Electrodes
Russian Microelectronics Pub Date : 2022-09-08 , DOI: 10.1134/s1063739722050043
V. P. Dragunov , D. I. Ostertak , R. E. Sinitskiy , E. V. Dragunova

Abstract

The results of studying the influence of impact interactions on the operation of a three-electrode two-capacitor microelectromechanical transducer (MEMT) and a microgenerator based on it are presented. The operation of the microgenerator in the impact periodic mode is analyzed for two extreme cases, when the movable electrode initially comes into contact with the limiters located on the left (LWC) or right (RWC) walls of the casing. The relationship between the system parameters and the characteristics of the external driving force source, which makes it possible to evaluate the possibility of implementing a periodic impact operation, is obtained. The dependences of the average generated power of the impact microgenerator on the number of collisions and the load are calculated. It is shown that a microgenerator with a three-electrode MEMT, in the case when the movable electrode initially comes into contact with the limiters located on the LWC, develops more power than in the case when the movable electrode initially touches the limiters located on the RWC. The efficiency of the microgenerator in impact and nonimpact modes is compared. It is shown that when using the impact mode, a gain by factors of 2 to 5 in the developed power is possible with a significant decrease of 1 to 2 orders of magnitude of the optimal load resistance compared to using an equivalent impact-free mode. In general, the analysis carried out and the developed approach make it possible to significantly narrow the range of the search for the necessary system parameters at the preliminary design stage and reduce the design time.



中文翻译:

三电极静电微型发电机在电极碰撞情况下的运行特点

摘要

介绍了冲击相互作用对三电极双电容微机电换能器(MEMT)和基于它的微型发电机运行影响的研究结果。针对两种极端情况分析了微型发电机在冲击周期模式下的运行情况,即活动电极最初与位于外壳左侧 (LWC) 或右侧 (RWC) 壁上的限制器接触时。获得了系统参数与外部驱动力源特性之间的关系,从而可以评估实施周期性冲击操作的可能性。计算了冲击式微型发电机的平均发电功率对碰撞次数和负载的依赖性。结果表明,具有三电极 MEMT 的微型发电机,在可移动电极最初与位于 LWC 上的限制器接触的情况下,比在可移动电极最初接触位于 RWC 上的限制器时产生更多的功率。比较了微型发电机在冲击和非冲击模式下的效率。结果表明,当使用冲击模式时,与使用等效的无冲击模式相比,最佳负载阻力显着降低 1 到 2 个数量级,可将开发功率提高 2 到 5 倍。一般来说,所进行的分析和开发的方法可以显着缩小在初步设计阶段寻找必要系统参数的范围,并减少设计时间。

更新日期:2022-09-09
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