Intensity of Raman bands in substrates covered with transparent overlayers can be enhanced due to optical interference, leading to incorrect quantitative interpretation of Raman signals. If thickness and optical properties of the overlayer are known, correction can be done using appropriate models. We theoretically discuss and experimentally evaluate a model where thickness and refractive index of the overlayer remain unknown and determination of enhancement factor is possible via linear relationship to reflectance-related response of the whole structure. Correct interpretation of the spectra is then possible since refractive index and thickness of the transparent layer are implicitly introduced in the measured reflectance. For experimental evidence we exploit SiN_x/Si and SiO₂/Si structures to find a significant correspondence with the model, aiming toward correlative reflectance and Raman spectroscopy.

由于光学干涉，可以增强覆盖有透明覆盖层的基板中的拉曼带强度，从而导致拉曼信号的定量解释不正确。如果已知覆盖层的厚度和光学特性，则可以使用适当的模型进行校正。我们从理论上讨论和实验评估了一个模型，其中覆盖层的厚度和折射率仍然未知，并且可以通过与整个结构的反射率相关响应的线性关系来确定增强因子。由于透明层的折射率和厚度隐含在测量的反射率中，因此可以正确解释光谱。对于实验证据，我们利用 SiN _x /Si 和 SiO ₂/Si 结构以找到与模型的显着对应关系，旨在实现相关反射率和拉曼光谱。