Light detection and ranging (LiDAR) sensors enable precision sensing of an object in 3D. LiDAR technology is widely used in metrology, environment monitoring, archaeology, and robotics. It also shows high potential to be applied in autonomous driving. In traditional LiDAR sensors, mechanical rotator is used for optical beam scanning, which brings about limitations on their reliability, size, and cost. These limitations can be overcome by a more compact solid-state solution. Solid-state LiDAR sensors are commonly categorized into the following three types: flash-based LiDAR, microelectromechanical system (MEMS)-based LiDAR, and optical phased array (OPA)-based LiDAR. Furthermore, advanced optics technology enables novel nanophotonics-based devices with high potential and superior advantages to be utilized in a LiDAR sensor. In this review, LiDAR sensor principles are introduced, including three commonly used sensing schemes: pulsed time of flight (TOF), amplitude-modulated continuous wave TOF, and frequency-modulated continuous wave. Recent advances in conventional solid-state LiDAR sensors are summarized and presented, including flash-based LiDAR, MEMS-based LiDAR, and OPA-based LiDAR. The recent progress on emerging nanophotonics-based LiDAR sensors is also covered. A summary is made and the future outlook on advanced LiDAR sensors is provided.

中文翻译：

---

固态激光雷达和基于纳米光子学的激光雷达传感器的进展回顾

光探测和测距 (LiDAR) 传感器能够以 3D 方式精确感测物体。激光雷达技术广泛应用于计量学、环境监测、考古学和机器人学。它还显示出应用于自动驾驶的巨大潜力。在传统的激光雷达传感器中，机械旋转器用于光束扫描，这对其可靠性、尺寸和成本带来了限制。这些限制可以通过更紧凑的固态解决方案来克服。固态激光雷达传感器通常分为以下三种类型：基于闪存的激光雷达、基于微机电系统（MEMS）的激光雷达和基于光学相控阵（OPA）的激光雷达。此外，先进的光学技术使基于纳米光子学的新型设备具有巨大的潜力和优越的优势，可用于 LiDAR 传感器。在这篇评论中，介绍了激光雷达传感器原理，包括三种常用的传感方案：脉冲飞行时间（TOF）、调幅连续波TOF和调频连续波。总结和介绍了传统固态激光雷达传感器的最新进展，包括基于闪存的激光雷达、基于 MEMS 的激光雷达和基于 OPA 的激光雷达。还涵盖了新兴的基于纳米光子学的 LiDAR 传感器的最新进展。进行了总结并提供了先进 LiDAR 传感器的未来展望。和基于 OPA 的激光雷达。还涵盖了新兴的基于纳米光子学的 LiDAR 传感器的最新进展。进行了总结并提供了先进 LiDAR 传感器的未来展望。和基于 OPA 的激光雷达。还涵盖了新兴的基于纳米光子学的 LiDAR 传感器的最新进展。进行了总结并提供了先进 LiDAR 传感器的未来展望。