Abstract

The aim of the present research is to study some aspects of the carbon doping of TiO₂ thin films and the influence of low temperature thermal annealing on the phase precipitation in thin films. Тhin films of heavily doped with carbon TiO₂ (up to 3 at % C) were deposited on (15 × 25 × 1 mm) glass substrates by r.f. magnetron co-sputtering of TiO₂ target and carbon plates on its erosion zone in Ar + air (residual pressure of 0.5 and 0.6 Pa, respectively) atmosphere. Two different process’s parameters were varied in different experiments in order to change the carbon content: the total area of the carbon plates which was 30, 84, 132, 400 and 830 mm²) and the radial distance between the center of the circle of the erosion zone with maximum rate of sputtering which was 2 and 4 cm. The as-deposited and annealed (air, 400°C, 1h) thin films with thickness of 110–150 nm were studied by ellipsometry, grazing incidence X-ray diffractometry (GIXRD), X-ray photoelectron spectroscopy, Raman spectroscopy, transmission and scanning electron microscopies. The GIXRD patterns reveal a mix of amorphous and nanocrystalline anatase and rutile TiO₂ phases for all thin films. The Raman study confirms this conclusion but the TEM and GIXRD studies show presence of non-stoichiometric nanocrystalline phase based on Ti₃C₂₀O₁₄ together with the other phases of TiO₂-anatase, rutile and brookite. Similar charcterizations were carried out after annealing at 400°C in air for 60 min and the most prominent effects of thermal treatment are discussed.

中文翻译：

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射频磁控溅射法沉积重掺杂二氧化钛碳薄膜的结构和相组成研究

摘要

本研究的目的是研究TiO ₂薄膜的碳掺杂以及低温热退火对薄膜相析出的影响。_{通过射频磁控管共溅射 TiO 2}靶材和碳板在 Ar + 腐蚀区上的 TiO 2 靶材和碳板，在 (15 × 25 × 1 mm) 玻璃基板上沉积重掺杂碳 TiO ₂（高达 3 at % C）的Тhin薄膜空气（残压分别为 0.5 和 0.6 Pa）大气。为了改变碳含量，在不同的实验中改变了两种不同的工艺参数：碳板的总面积分别为 30、84、132、400 和 830 mm ²) 以及最大溅射速率的腐蚀区圆心之间的径向距离为 2 和 4 厘米。采用椭偏仪、掠入射 X 射线衍射仪 (GIXRD)、X 射线光电子能谱、拉曼光谱、透射和扫描电子显微镜。GIXRD 图案揭示了所有薄膜的无定形和纳米晶锐钛矿和金红石 TiO _{2相的混合。}拉曼研究证实了这一结论，但 TEM 和 GIXRD 研究表明存在基于 Ti ₃ C ₂₀ O ₁₄的非化学计量纳米晶相以及 TiO _{2的其他相}-锐钛矿、金红石和板钛矿。在空气中 400°C 退火 60 分钟后进行了类似的表征，并讨论了热处理的最显着效果。