SO₂F₂ and SOF₂ are important characteristic decomposition components of SF₆. Accurate detection of these two gases is helpful for fault diagnosis of gas-insulated switchgear (GIS). In this article, the infrared characteristic peaks of SO₂F₂ and SOF₂ were obtained by comparing the simulation and experimental infrared spectrum. Then, cross interference analysis was performed with SF₆ characteristic components such as H₂S, SO₂, CO, and SF₆ background gas to determine the appropriate detection bands for SO₂F₂ and SOF₂. Tunable diode laser absorption spectroscopy (TDLAS) experiment platform was built based on quantum cascade laser with center wavelength at 1506.4 and 1340.2 cm⁻¹. The concentration of SO₂F₂ and SOF₂ is detected through this platform. And the concentration information of gas is deduced by detecting the voltage value of second harmonic signal. The experimental results show that, for SO₂F₂ gas between 1.01 and 19.88 ppm, the $R^{2}$ is 0.989 and the maximum relative error is 2.044%. For SOF₂ gas between 1.03 and 9.00 ppm, the ${R}^{{2}}$ is 0.992 and the maximum relative error is 0.728%. SO₂ gas may cause weak interference to SOF₂ detection, which has some regularities, and the interference can be eliminated by selecting the appropriate SOF₂ fitting linear equation. The research results provide a feasible scheme for the quantitative detection of SO₂F₂ and SOF₂ gases.

中文翻译：

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SF6特征分解成分SO2F2和SOF2的红外光谱分析与定量检测

SO ₂ F ₂和SOF ₂是SF ₆的重要特征分解成分。这两种气体的准确检测有助于气体绝缘开关设备（GIS）的故障诊断。本文通过对比模拟和实验红外光谱得到SO ₂ F ₂和SOF _{2的红外特征峰。然后，对H 2} S、SO ₂、CO、SF _{6背景气体等SF 6}特征成分进行交叉干扰分析，确定SO ₂ F _{2的合适检测波段}和 SOF ₂。^{基于中心波长为1506.4和1340.2 cm -1}的量子级联激光器搭建了可调谐二极管激光吸收光谱（TDLAS）实验平台。通过该平台检测SO ₂ F ₂和SOF _{2的浓度。}并通过检测二次谐波信号的电压值推导出气体的浓度信息。实验结果表明，对于1.01 和 19.88 ppm 之间的 SO ₂ F _2气体， $R^{2}$为 0.989，最大相对误差为 2.044%。对于1.03 和 9.00 ppm 之间的 SOF _2气体， ${R}^{{2}}$为 0.992，最大相对误差为 0.728%。SO ₂气体可能对SOF ₂检测产生微弱的干扰，具有一定的规律性，可以通过选择合适的SOF ₂拟合线性方程来消除干扰。_{研究结果为SO 2} F ₂和SOF ₂气体的定量检测提供了可行的方案。