The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S₁ mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonators, based on a 400-nm X-cut lithium niobate film, showed a resonance frequency over 8 GHz. Moreover, a PMMA layer was used as the mass-sensing layer, to study the performance of the biosensors based on HF-LWRs. Through optimizing the thickness of the lithium niobate film and the electrode configuration, the mass sensitivity of the biosensor could reach up to 74,000 Hz/(ng/cm²), and the maximum value of figure of merit (FOM) was 5.52 × 10⁷, which shows great potential for pushing the performance boundaries of gravimetric-sensitive acoustic biosensors.

中文翻译：

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基于S1模式兰姆波谐振器的高灵敏度重力生物传感器

MEMS声学谐振器的发展满足了对更高性能和更小尺寸的原位检测日益增长的需求。本文提出了一种用于高灵敏度重力生物传感的基于铌酸锂薄膜的 S ₁​​ 模式兰姆波谐振器（HF-LWR）。基于 400 nm X 切割铌酸锂薄膜制造的谐振器显示出超过 8 GHz 的谐振频率。此外，PMMA 层用作质量传感层，以研究基于 HF-LWR 的生物传感器的性能。通过优化铌酸锂薄膜的厚度和电极配置，生物传感器的质量灵敏度最高可达74,000 Hz/(ng/cm ² )，品质因数(FOM)最大值为5.52 × 10 ⁷，这显示出推动重量敏感声学生物传感器性能边界的巨大潜力。