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Observation of in-plane shear stress fields in off-axis SiC wafers by birefringence imaging
Journal of Applied Crystallography ( IF 5.2 ) Pub Date : 2022-07-30 , DOI: 10.1107/s1600576722006483
Shunta Harada 1 , Kenta Murayama 2
Affiliation  



中文翻译:

通过双折射成像观察离轴 SiC 晶片的面内剪切应力场

更新日期:2022-07-30
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