In this work, magnetoelectric MEMS sensors based on a TiN/AlN/Ni laminate are investigated for the first time in regards of the anisotropic elastic properties when using hard magnetic Nickel as magnetostrictive layer. The implications of crystalline, uniaxial and shape anisotropy are analysed arising from the anisotropic $\Delta$E effect in differently oriented cantilevers with 25 µm length and 15° spacing. The $\Delta$E effect is derived analytically to consider the angular dependency of the different anisotropies within the sensors. In the measured frequency spectra complex profiles are observable consisting of contributions from neighbouring structures which are connected by a common electrode. The crosstalk effect is strongly depending on the cantilever orientation and reflects the anisotropic mechanical properties of the material stack. The intensity of the crosstalk effect is increasing for shortened cantilevers and narrowing distance between structures. The $\Delta$E effect is investigated based on cantilevers of different angular spacing and of a single cantilever that is rotated in the magnetic field. The derived peak sensitivities are reaching values of 1.15 and 1.31 T⁻¹. The angular dependency of the sensitivity is found to be approximately constant for differently oriented cantilevers. In contrast, for a singly rotated cantilever an angular dependency of the 4th order is observed.

在这项工作中，首次研究了基于 TiN/AlN/Ni 层压板的磁电 MEMS 传感器在使用硬磁镍作为磁致伸缩层时的各向异性弹性特性。分析了由各向异性引起的结晶、单轴和形状各向异性的含义$\Delta$E 效应在具有 25  µm 长度和 15° 间距的不同方向的悬臂中。这$\Delta$E 效应是通过分析得出的，以考虑传感器内不同各向异性的角度依赖性。在测量的频谱中，可以观察到由通过公共电极连接的相邻结构的贡献组成的复杂轮廓。串扰效应很大程度上取决于悬臂方向，并反映了材料堆叠的各向异性机械性能。对于缩短的悬臂和缩小结构之间的距离，串扰效应的强度正在增加。这$\Delta$基于不同角间距的悬臂和在磁场中旋转的单个悬臂研究 E 效应。导出的峰值灵敏度达到 1.15 和 1.31  T ^-1的值。对于不同定向的悬臂，发现灵敏度的角度依赖性近似恒定。相反，对于单独旋转的悬臂，观察到 4 阶的角度依赖性。