This paper focuses on the properties of light scattering spectra from a spherical particle and their application for particle size measurement. The influence of particle size and scattering angle on the scattering spectra are investigated and simulated. An ultra-resolution particle dimension measurement method was proposed based on detecting the peak of scattering spectra. An accurate spectral peak location strategy based on the spectral shape features is adopted to reduce the spectra peak positioning error caused by dispersion. The size of smaller particle is measured by locating a wide scattering spectral peak at a larger scattering angle to achieve higher measurement sensitivity, while the size of larger particle is measured by locating a narrow scattering spectral peak at a smaller angle to achieve a larger measurement range. If the spectral resolution of the spectrometer is 0.8 nm, the particle size resolution of 1.1 nm and 8.3 nm are achieved for measured particles with sizes ranging from 0.25µm to 1µm and measured particles with sizes ranging from 1µm to 10µm, respectively. And if the spectrometer with picometer resolution is used, the particle size resolution is expected to be on the order of picometers.

中文翻译：

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基于散射光谱分析的超高分辨率粒度测量——模拟与实验

本文重点研究球形颗粒的光散射光谱特性及其在粒度测量中的应用。研究并模拟了粒径和散射角对散射光谱的影响。提出了一种基于检测散射光谱峰值的超分辨颗粒尺寸测量方法。采用基于光谱形状特征的精确光谱峰定位策略，减少色散引起的光谱峰定位误差。较小颗粒的尺寸是通过将较宽的散射光谱峰定位在较大的散射角以实现较高的测量灵敏度，而较大颗粒的尺寸是通过将较窄的散射光谱峰定位在较小的角度以实现较大的测量范围. 如果光谱仪的光谱分辨率为 0.8 nm，则测量粒径范围为 0.25 µm 至 1 µm 的颗粒和粒径范围为 1 µm 至 10 µm 的颗粒的粒径分辨率分别为 1.1 nm 和 8.3 nm。而如果使用具有皮米分辨率的光谱仪，粒度分辨率预计在皮米量级。