Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds,Analytical Chemistry

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Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds
Analytical Chemistry ( IF 6.7 ) Pub Date : 2022-07-31 , DOI: 10.1021/acs.analchem.2c01463
Junchao Zhou ₁ , Diana Al Husseini ₂ , Junyan Li ₁ , Zhihai Lin ₁ , Svetlana Sukhishvili ₂ , Gerard L Coté ₃ , Ricardo Gutierrez-Osuna ₄ , Pao Tai Lin _{1,

2}

Affiliation

Chip-scale infrared spectrometers consisting of a microring resonator array (MRA) were developed for volatile organic compound (VOC) detection. The MRA is serially positioned to serve as a wavelength sorting element that enables wavelength demultiplexing. Unlike conventional devices operated by a single microring, our MRA can perform multiwavelength mid-infrared (mid-IR) sensing by routing the resonant wavelength light from a broadband mid-IR source into different sensing channels. Miniaturized spectrometer devices were fabricated on mid-IR transparent silicon-rich silicon nitride (SiN_x) thin films through complementary metal–oxide-semiconductor (CMOS) processes, thus enabling wafer-level manufacturing and packaging. The spectral distribution of the resonance lines and the optimization of the microring structures were designed using finite-difference time-domain (FDTD) modeling and then verified by laser spectrum scanning. Using small microring structures, the spectrum showed a large free spectral range (FSR) of 100 nm and held four spectral channels without crosstalk. Unlike near-infrared microrings using refractive index sensing, our MRA can detect hexane and ethanol vapor pulses by monitoring the intensity variation at their characteristic mid-IR absorption bands, thus providing high specificity. Applying multiwavelength detection, the sensor module can discriminate among various VOC vapors. Hence, our mid-IR MRA could be an essential component to achieve a compact spectroscopic sensing module that has the potential for applications such as remote environmental monitoring and portable health care devices.

中文翻译：

用于实时检测气相挥发性有机化合物的中红外串行微环谐振器阵列

开发了由微环谐振器阵列 (MRA) 组成的芯片级红外光谱仪，用于检测挥发性有机化合物 (VOC)。MRA 串联定位，用作波长分选元件，可实现波长解复用。与由单个微环操作的传统设备不同，我们的 MRA 可以通过将来自宽带中红外源的谐振波长光路由到不同的传感通道来执行多波长中红外 (mid-IR) 传感。在中红外透明的富硅氮化硅（SiN _x) 通过互补金属氧化物半导体 (CMOS) 工艺制备薄膜，从而实现晶圆级制造和封装。使用有限差分时域 (FDTD) 建模设计共振线的光谱分布和微环结构的优化，然后通过激光光谱扫描进行验证。使用小的微环结构，光谱显示出 100 nm 的大自由光谱范围 (FSR)，并保持四个光谱通道而没有串扰。与使用折射率传感的近红外微环不同，我们的 MRA 可以通过监测其特征中红外吸收带的强度变化来检测己烷和乙醇蒸汽脉冲，从而提供高特异性。应用多波长检测，传感器模块可以区分各种 VOC 蒸汽。因此，

更新日期：2022-07-31

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