A dual-coil micro-impedance resonant sensor for on-line detection and impurity analysis of mechanical oil systems was designed in this experiment. Through the design of the double coil, inductance detection and capacitance detection are realized on the same chip. Furthermore, the resonant circuit formed by the sensor plus an inductive element and a capacitive element further improves the detection sensitivity of the sensor. This paper establishes a resonant circuit model and conducts theoretical analysis. It verifies the accuracy of theoretical analysis by comparing the micro-impedance resonant sensor with the sensor without micro-impedance resonance. It is confirmed that the resonant sensor has better detection sensitivity. The experimental results determine the frequency characteristics and the optimal frequency of the resonant sensor. This paper has a guiding role in the design of such sensors, and providing technical support for the development of online detection.

本实验设计了一种用于机械油系统在线检测和杂质分析的双线圈微阻抗谐振传感器。通过双线圈的设计，在同一芯片上实现电感检测和电容检测。此外，传感器加上电感元件和电容元件形成的谐振电路进一步提高了传感器的检测灵敏度。本文建立了谐振电路模型并进行了理论分析。通过将微阻抗谐振传感器与没有微阻抗谐振的传感器进行比较，验证了理论分析的准确性。确认谐振传感器具有更好的检测灵敏度。实验结果确定了谐振传感器的频率特性和最佳频率。