The performance of Ti films coated on SUS 304 stainless steel and soda-lime glass using direct current (DC) sputtering has been analyzed in this study. The quality characteristics of the films were examined by means of Taguchi design, with an orthogonal array, signal-to-noise (S/N) ratio and analysis of variance (ANOVA). Progressive loading was used to induce failure in the Ti film with scratch adhesion critical loads L_C1 and L_C2 on the substrate surface. The X-ray diffraction spectrum of the Ti-coated films depict hexagonal close-packed (HCP) structural with (100), (002) and (101). The analysis of S/N ratios, grey Taguchi and ANOVA for multiple quality performance shows that the contribution of DC power and deposition time to the multiple quality characteristics is 79.21% and 11.04% respectively. In the confirmation study, based on the grey Taguchi design system, the rate of improvement is 10.34% in coefficient of friction, 17.84% in corrosion potential, 10.15% in micro-hardness, and 5.99% in elastic recovery, respectively.

本研究分析了使用直流 (DC) 溅射在 SUS 304 不锈钢和钠钙玻璃上镀钛薄膜的性能。薄膜的质量特性通过田口设计、正交阵列、信噪比 (S/N) 和方差分析 (ANOVA) 进行检查。渐进加载用于在具有划痕粘附临界载荷 L _C1和 L _{C2的 Ti 膜中诱导失效}在基板表面上。Ti 涂层薄膜的 X 射线衍射光谱描绘了具有 (100)、(002) 和 (101) 的六方密排 (HCP) 结构。对多重质量性能的信噪比、灰色田口和方差分析表明，直流功率和沉积时间对多重质量特性的贡献分别为79.21%和11.04%。在验证研究中，基于灰色田口设计体系，摩擦系数提高率分别为10.34%、腐蚀电位提高率17.84%、显微硬度提高率10.15%、弹性回复率提高率5.99%。