Abstract

The content of total organic carbon is an important indicator for ultrapure water. The existing TOC measuring device based on UV oxidation uses a large volume oxidation cell, which leads to low oxidation efficiency. Also, using NDIR sensors to measure the carbon dioxide content will generate a series of complex processes and eventually causes low measurement efficiency and accuracy. To address these problems, we designed a new type of TOC measuring device combining UV oxidation and electrical conductivity measurement. A small volume oxidation cell with precise structure is designed and applied to this device. The optimum volume was obtained through a series of comparative experiments, both oxidation rate and accuracy are improved. The hardware and software development of electronic control system are carried out based on a high performance and low power embedded micro-controller. Through a series of experiments, it is proved that this design not only improves the measurement efficiency, but also has the advantages of high accuracy, low cost, no pollution and low power consumption.

摘要

总有机碳含量是超纯水的一项重要指标。现有基于UV氧化的TOC测量装置采用大体积氧化池，导致氧化效率低。此外，使用NDIR传感器测量二氧化碳含量会产生一系列复杂的过程，最终导致测量效率和准确性低下。针对这些问题，我们设计了一种结合了紫外氧化和电导率测量的新型TOC测量装置。设计了一种结构精密的小体积氧化池，并应用于该装置。通过一系列对比实验得到最佳体积，氧化率和精度都有所提高。电控系统的硬件和软件开发是基于一个高性能、低功耗的嵌入式微控制器进行的。通过一系列实验证明，这种设计不仅提高了测量效率，而且具有精度高、成本低、无污染、低功耗等优点。