The environment with high-stability temperature is crucial for precision machinery such as lithography and laser interferometer. Some studies have investigated temperature control algorithms and temperature fluctuation attenuators to provide precision temperature control systems for them. In this paper, considering the characteristics of hardware elements and the closed control loop overall, a general control loop connected by multiple cascade loops is proposed for high-precision air temperature control to reject the disturbance from the inlet air. It is found that this disturbance and the noise generated by the non-uniform air temperature of the chamber are the two main sources affecting the control precision. Based on loop shaping, a controller with compensators is designed for the cascade control loop to make a tradeoff between the disturbance rejection and noise attenuation. The lumped parameter theoretical models of three kinds of attenuators for air temperature fluctuation are analysed for the design of precision air temperature control. An air temperature control system is used to verify the performance of the proposed controller. The results demonstrate that the controller can improve the disturbance rejection performance while reducing the sensitivity to the noise. The $1\sigma$ derivation of the chamber air temperature is decreased from 15.6 mK to 10.5 mK.

具有高稳定温度的环境对于光刻机和激光干涉仪等精密机械至关重要。一些研究已经研究了温度控制算法和温度波动衰减器，以为它们提供精确的温度控制系统。在本文中，考虑到硬件元件的特点和整体闭环控制回路，提出了一个由多个级联回路连接的通用控制回路，用于高精度空气温度控制，以抑制来自进气的干扰。研究发现，这种扰动和腔室空气温度不均匀产生的噪声是影响控制精度的两个主要来源。基于循环整形，为级联控制回路设计了一个带补偿器的控制器，以在抗扰和噪声衰减之间进行权衡。分析了三种空气温度波动衰减器的集总参数理论模型，用于精密空气温度控制设计。空气温度控制系统用于验证所提出的控制器的性能。结果表明，该控制器可以提高抗扰性能，同时降低对噪声的敏感度。这 结果表明，该控制器可以提高抗扰性能，同时降低对噪声的敏感度。这 结果表明，该控制器可以提高抗扰性能，同时降低对噪声的敏感度。这$1\sigma$室内空气温度的推导从 15.6 mK 降低到 10.5 mK。