Many attempts have been made on the design and fabrication of low-power consumption gas sensor for application on the Internet of Things and portable devices. The performance of gas sensors includes sensitivity, selectivity, and power consumption, which are strongly dependent on the configuration of the device such as the gap size between two electrodes, the sensing material, and operation principle. Here, self-heated In₂O₃ nanowire-based gas sensors were designed and fabricated by on-chip growth technique via thermal evaporation to work at room temperature. The effect of electrode gap (10–40 µm) on the power consumption and gas sensing performance of the In₂O₃ nanowire sensors was studied. With the large gap of 40 µm, the sensor exhibited excellent sensing characteristics of low power consumption (1.06 mW) with ability to detect ethanol gas down to 20 ppm effectively. We also examined the role of nanowire conductivity in the performance of the self-heated sensor in the detection of reducing gas. The sensor demonstrated rapid response and recovery times of less than a minute, exceptional stability, and remarkable recovery.

在设计和制造用于物联网和便携式设备的低功耗气体传感器方面已经进行了许多尝试。气体传感器的性能包括灵敏度、选择性和功耗，这在很大程度上取决于设备的配置，例如两个电极之间的间隙大小、传感材料和工作原理。在这里，基于自加热 In ₂ O ₃纳米线的气体传感器通过热蒸发的片上生长技术设计和制造，以在室温下工作。_{电极间隙 (10–40 µm) 对 In 2} O ₃功耗和气敏性能的影响研究了纳米线传感器。凭借 40 µm 的大间隙，该传感器表现出出色的低功耗 (1.06 mW) 传感特性，能够有效检测低至 20 ppm 的乙醇气体。我们还研究了纳米线电导率在自热传感器检测还原气体中的作用。该传感器表现出不到一分钟的快速响应和恢复时间、出色的稳定性和显着的恢复。