Abstract

An analytical model for describing the energy spectra of light medium-energy ions reflected from the surface of a solid, or medium-energy ion spectra (MEIS), is constructed. The method is based on the OKG (Oswald–Kasper–Gaukler) method, which has been reliably tested and widely used in electron spectroscopy. A technique is developed for interpreting the MEIS spectra of ions reflected from layered inhomogeneous samples. In this paper, we show that the interpretation of MEIS data based on the use of data available in the literature on the average energy loss per unit length (stopping power) can lead to such significant errors that it does not allow us to consider MEIS as a quantitative technique. It is pointed out that the approach developed in this paper makes it possible to successfully test the stopping power data.

中文翻译：

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电子能谱解释方法在离子能谱信号解释中的应用

摘要

构建了用于描述从固体表面反射的轻中能离子的能谱或中能离子谱(MEIS)的分析模型。该方法基于 OKG（Oswald-Kasper-Gaukler）方法，该方法已经过可靠测试并广泛用于电子光谱学。开发了一种用于解释从分层不均匀样品反射的离子的 MEIS 光谱的技术。在本文中，我们表明，基于使用文献中可用的关于每单位长度的平均能量损失（停止功率）的数据来解释 MEIS 数据可能会导致如此严重的错误，以至于我们无法将 MEIS 视为一种定量技术。需要指出的是，本文开发的方法使得成功测试制动力数据成为可能。