Carbon nanoparticles were synthesized using a 13.56 MHz radiofrequency (RF) discharge of Ar/CH₄ plasma in pulsed mode to control the nanoparticle size. Experimental observations have shown that the size of carbon nanoparticles increases with the frequency of the pulse signal. It was also found that by using a frequency modulated pulsed RF signal it is possible to control the size of carbon nanoparticles in the 40–70 nm range, where the plasma-enhanced chemical vapour deposition method is the main mechanism for nanoparticle growth. Transmission electron microscopy image analysis showed two types of nanoparticles, some of which are an agglomerate of nanoparticles with an amorphous structure, while the others are nanometre-sized with crystalline structures. Changes in the modulation frequency and synthesis time help to obtain different films with different values of the contact angle.

中文翻译：

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脉冲射频放电合成碳纳米粒子的特性及其对表面疏水性的影响

_{使用 Ar/CH 4}的 13.56 MHz 射频 (RF) 放电合成碳纳米粒子等离子体以脉冲模式控制纳米颗粒尺寸。实验观察表明，碳纳米粒子的尺寸随着脉冲信号的频率而增加。还发现，通过使用调频脉冲 RF 信号，可以将碳纳米粒子的尺寸控制在 40-70 nm 范围内，其中等离子体增强化学气相沉积法是纳米粒子生长的主要机制。透射电子显微镜图像分析显示了两种类型的纳米粒子，其中一些是具有非晶结构的纳米粒子团聚体，而另一些是具有晶体结构的纳米尺寸。调制频率和合成时间的变化有助于获得具有不同接触角值的不同薄膜。