A two-stage process of sintering yttrium iron garnet ceramics for magnetron sputtering has been proposed and tested. It has been shown that uniaxial pressing of compacts results in the synthesis of nanosized crystallites of yttrium iron garnet. The crystal structure of the obtained ceramic samples has been studied. Epitaxial films are grown on yttrium aluminum garnet substrates by magnetron sputtering of the obtained target.

中文翻译：

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用于磁控溅射的钇铁石榴石陶瓷的两阶段烧结

提出并测试了用于磁控溅射的钇铁石榴石陶瓷的两阶段烧结工艺。已经表明，压块的单轴压制导致钇铁石榴石纳米级微晶的合成。研究了所得陶瓷样品的晶体结构。通过磁控溅射获得的靶，在钇铝石榴石衬底上生长外延膜。