Preparing large-size metallic glassy micro/nano devices/structures with high uniformity and precision is a very important and challenge topic in up-down nanotechnologies and their applications. It shows that the newly developed die-imprinting technique of metallic glasses (MGs) exhibits better uniformity and precision than the commonly used free-imprinting, despite of that the related mechanism and processing kinetics have not been fully understood. However, understanding the factors affecting the processing uniformity and processing kinetics is very important for controlling the processing precision of the MG nano/micro structures. In the present study, the processing uniformity as well as the processing kinetics of MGs in die-imprinting was systematically investigated. A universal processing kinetics formula of MGs’ die-imprinting has been proposed by quantitative evaluating the effect of the oxide layer for the first time. The processing kinetics formula has been proved applicable both in micro and nano scale by experimental results. It has also been found that the die-imprinting possesses excellent and stable processing uniformity in a large area, which is an order of magnitude better than that of the free-imprinting. Especially, the prepared MG with micro/nano structures could be employed as imprinting mold to fabricate micro/nano structures on plastics or other materials in larger scale. The present work provides both experimental and theoretical fundaments for the controllable die-imprinting of MGs to fabricate micro/nano structure or devices, and can greatly promote the further applications of MGs.

制备具有高均匀性和精度的大尺寸金属玻璃微/纳米器件/结构是上下纳米技术及其应用中非常重要和具有挑战性的课题。这表明新开发的金属玻璃（MGs）模具压印技术比常用的自由压印技术表现出更好的均匀性和精度，尽管相关机制和加工动力学尚未完全了解。然而，了解影响加工均匀性和加工动力学的因素对于控制 MG 纳米/微米结构的加工精度非常重要。在本研究中，系统地研究了 MG 在模具压印中的加工均匀性和加工动力学。首次通过对氧化层效应的定量评价，提出了一种通用的MGs模压加工动力学公式。实验结果证明加工动力学公式在微米和纳米尺度上均适用。还发现模压印在大面积上具有优异且稳定的加工均匀性，比自由压印好一个数量级。特别是，制备的具有微/纳米结构的MG可以用作压印模具，在塑料或其他材料上更大规模地制造微/纳米结构。目前的工作为MGs可控压模制造微/纳米结构或器件提供了实验和理论基础，可以极大地促进MGs的进一步应用。