This paper presents the design, modelling, analysis, and test of a piezo-actuated dual-drive linear motion system, capable of millimeter stroke with nanometer resolution. The primary actuator is a two-stage bridge-type amplifier with hybrid flexure hinges, which is driven by a piezo-stack actuator and generates output stroke greater than 6 mm. The micro actuation is directly driven by an extra piezo-stack to achieve resolution of 20 nm. A very large amplification ratio of 91 is achieved, which implies not only large stroke but also compactness. An inherent characteristic for the multi-stage compliant displacement amplifier, ‘kick-back’ phenomenon, is first analyzed and eliminated by using the stiffness distribution method. The architectural parameters are optimized by genetic algorithm to find the trade-off among natural frequency, stroke and stiffness ratio. The optimized design was then fabricated and tested. The superiority of the proposed system is remarkable compared with other similar works. The concept and approach outlined are generic and can be extended to this class of actuators.

本文介绍了压电驱动双驱动直线运动系统的设计、建模、分析和测试，该系统能够实现毫米级行程和纳米级分辨率。主执行器是一个带有混合弯曲铰链的两级桥式放大器，它由一个压电堆栈执行器驱动，并产生大于 6 毫米的输出冲程。微驱动由额外的压电堆栈直接驱动，以实现 20 nm 的分辨率。实现了 91 的非常大的放大比，这意味着不仅行程大，而且紧凑。首先使用刚度分布法分析并消除了多级柔顺位移放大器的固有特性“反冲”现象。通过遗传算法优化架构参数，以找到自然频率之间的权衡，行程和刚度比。然后制造和测试优化的设计。与其他类似作品相比，所提出的系统的优越性是显着的。概述的概念和方法是通用的，可以扩展到此类执行器。