Electron-beam lithography of cinnamate polythiophene films: conductive nanorods for electronic applications,Chemical Science

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Electron-beam lithography of cinnamate polythiophene films: conductive nanorods for electronic applications
Chemical Science ( IF 7.6 ) Pub Date : 2022-06-16 , DOI: 10.1039/d2sc01867e
N Maximilian Bojanowski ₁ , Christian Huck _{2,

3} , Lisa Veith ₂ , Karl-Philipp Strunk ₄ , Rainer Bäuerle _{1,

4} , Christian Melzer ₄ , Jan Freudenberg ₁ , Irene Wacker ₅ , Rasmus R Schröder ₅ , Petra Tegeder _{2,

3} , Uwe H F Bunz _{1,

2}

Affiliation

We report the electron-beam induced crosslinking of cinnamate-substituted polythiophene proceeding via excited state [2+2]-cycloaddition. Network formation in thin films is evidenced by infrared spectroscopy and film retention experiments. For the polymer studied herin, the electron-stimulated process appears to be superior to photo (UV)-induced crosslinking as it leads to less degradation. Electron beam lithography (EBL) patterns cinnamate-substituted polythiophene thin films on the nanoscale with a resolution of around 100 nm. As a proof of concept, we fabricated nanoscale organic transistors using doped and cross-linked P3ZT as contact fingers in thin film transistors.

中文翻译：

肉桂酸酯聚噻吩薄膜的电子束光刻：用于电子应用的导电纳米棒

我们报告了通过激发态[2+2]-环加成进行的肉桂酸酯取代的聚噻吩的电子束诱导交联。红外光谱和薄膜保留实验证明了薄膜中的网络形成。对于本文研究的聚合物，电子刺激过程似乎优于光 (UV) 诱导的交联，因为它导致较少的降解。电子束光刻 (EBL) 在纳米尺度上以约 100 nm 的分辨率图案化肉桂酸酯取代的聚噻吩薄膜。作为概念验证，我们使用掺杂和交联的P3ZT作为薄膜晶体管中的接触指制造了纳米级有机晶体管。

更新日期：2022-06-16

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