In this paper, a gas sensing technique based on multi-resonance photoacoustic spectroscopy (M-PAS) is firstly proposed for simultaneous detection of multi-component gas molecules. To explore the capabilities of this technique, a spherical resonator with multiple resonant modes and high quality factors are detailedly developed by theoretical simulation and experimental analysis. The proposed M-PAS technique combing with wavelength modulation spectroscopy (WMS) is investigated for simultaneous detection of H₂O, CO₂ and CH_4, respectively_. Based on Allan-Werle deviation analysis, the detection limits of 1.17 ppm for H₂O, 83 ppm for CO₂ and 1.76 ppm for CH₄, respectively, at the integration time of 136 s, 181 s and 195 s were achieved, corresponding to the normalized noise equivalent absorption (NNEA) coefficient of 6.03 × 10⁻¹⁰ cm⁻¹W/√Hz, 5.46 × 10⁻¹⁰ cm⁻¹W/√Hz, 2.36 × 10⁻⁹ cm⁻¹W/√Hz. The reported sensing technique has potential applications in atmospheric environment monitoring, industrial process control and breath gas analysis by appropriate improvements, and can easily be modified for other multi-component gas analysis.

本文首次提出了一种基于多共振光声光谱（M-PAS）的气体传感技术，用于同时检测多组分气体分子。为了探索该技术的能力，通过理论模拟和实验分析详细开发了具有多种谐振模式和高质量因子的球形谐振器。所提出的 M-PAS 技术与波长调制光谱 (WMS) 相结合，分别用于同时检测 H ₂ O、CO ₂和 CH _{4 。}基于 Allan-Werle 偏差分析，H ₂ O 的检测限为 1.17 ppm，CO _{2的检测限为 83 ppm，CH 4}的检测限为1.76 ppm，分别在 136 秒、181 秒和 195 秒的积分时间，对应于归一化噪声等效吸收 (NNEA) 系数 6.03 × 10 ^-10 cm ^-1 W/√Hz, 5.46 × 10 ^-10 cm ^-1 W/√Hz，2.36 × 10 ^-9 cm ^-1 W/√Hz。所报道的传感技术通过适当的改进在大气环境监测、工业过程控制和呼吸气体分析中具有潜在应用，并且可以很容易地修改用于其他多组分气体分析。