Single-Step-Lithography Micro-Stepper Based on Frictional Contact and Chiral Metamaterial,Small

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Single-Step-Lithography Micro-Stepper Based on Frictional Contact and Chiral Metamaterial
Small ( IF 13.0 ) Pub Date : 2022-06-16 , DOI: 10.1002/smll.202202128
Xiaojun Tan _{1,

2} , Julio Andrés Iglesias Martínez ₁ , Gwenn Ulliac ₁ , Bing Wang ₂ , Linzhi Wu ₂ , Johnny Moughames ₁ , Marina Raschetti ₁ , Vincent Laude ₁ , Muamer Kadic ₁

Affiliation

Stepper motors and actuators are among the main constituents of control motion devices. They are complex multibody systems with rather large overall volume due to their multifunctional parts and elaborate technological assembly processes. Miniaturization of individual parts is still posing assembly problems. In this paper, a single-step lithography process to fabricate a micro-stepper engine with an accurate micrometric rotation axis and an overall sub-millimeter size is demonstrated. The device is based on the frictional contacts and chiral metamaterials to get rid of the dependence on the accuracy of parts. The functional aspects of fabricated samples are discussed for many rotation cycles and for different frictional surfaces.

中文翻译：

基于摩擦接触和手性超材料的单步光刻微步进器

步进电机和执行器是控制运动设备的主要组成部分。它们是复杂的多体系统，由于其多功能部件和复杂的技术组装过程，总体积相当大。单个零件的小型化仍然是装配问题。在本文中，展示了一种单步光刻工艺，用于制造具有精确测微旋转轴和整体亚毫米尺寸的微步进发动机。该装置基于摩擦接触和手性超材料，摆脱了对零件精度的依赖。针对许多旋转循环和不同的摩擦表面讨论了制造样品的功能方面。

更新日期：2022-06-16

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