In this work, we proposed a simple method to estimate the F radical density in CF₄ and CF₄/O₂ plasmas using mass spectrometry. CF₄ and CF₄/O₂ plasmas were generated using various power and gas ratio in an inductively coupled plasma reactor. The origins of ion signals in mass spectrum were approximated based on the species densities, ionization cross sections and extraction efficiencies in the CF₄ and CF₄/O₂ plasmas. It was determined that majority of the CF₃⁺ ion signals originated from the ionization of CF₄, whereas the F⁺ ion signals originated from two main species of F radicals and CF₄ molecules. The relative F radical densities were determined by subtracting the F⁺ signals derived from the CF₄ molecules from the total F⁺ signals measured by mass spectrometry, where the F⁺ signals derived from the CF₄ molecules were estimated from CF₃⁺ signals. We found that more than 90% and 20–60% of the F⁺ ion signals were derived from the CF₄ molecules in the CF₄ and CF₄/O₂ plasmas, respectively, under our experimental conditions. The F radical densities were also estimated using optical actinometry, and the values determined by mass spectrometry and optical actinometry exhibited a linear relationship. We demonstrated the validity of the F radical density estimation in the CF₄ and CF₄/O₂ plasmas by mass spectrometry using the proposed method.

在这项工作中，我们提出了一种使用质谱法来估计 CF ₄和 CF ₄ /O _{2等离子体中的 F 自由基密度的简单方法。}CF ₄和CF ₄ /O ₂等离子体是在电感耦合等离子体反应器中使用各种功率和气体比产生的。_{基于 CF 4}和 CF ₄ /O ₂等离子体中的物质密度、电离横截面和提取效率来估计质谱中离子信号的来源。已确定大部分 CF ₃ ⁺离子信号源自 CF ₄的电离，而 F ⁺离子信号来源于两种主要的 F 自由基和 CF ₄分子。相对F自由基密度通过从质谱测量的总F + 信号中减去源自CF 4 分子的F ⁺信号_来^确定，其中源自CF _4分子的F ^+信号由CF ₃ ⁺信号估计。我们发现超过 90% 和 20-60% 的 F ⁺离子信号来自CF ₄和 CF ₄ /O _{2中的 CF 4}分子等离子体，分别在我们的实验条件下。F自由基密度也使用光学辐射测定法进行估计，质谱和光学辐射测定法测定的值呈现线性关系。我们使用所提出的方法通过质谱法证明了 CF ₄和 CF ₄ /O ₂等离子体中 F 自由基密度估计的有效性。