Sulfur hexafluoride (SF₆) is widely used in a variety of industrial processes and commercial products. However, this chemically stable gas is one of the most potent greenhouse gases (GHGs) contributing significantly to global warming. Therefore, to reduce greenhouse gas such as SF6, a new eco-friendly, economic, and stable treatment technology is required. In this study, the thermal decomposition characteristics of SF6 were investigated using a laboratory scale electrical tube furnace reactor and combustion-based pilot system. Based on these results, the SF₆ decomposition reaction order is around 1 and its activation energy (E_a) in the investigation temperature range is 238.04–257.18 kJ/mol. This value is used to calculate the reactor size when designing a commercial facility. Also, the experimental results of a combustion-based pilot system indicate that SF₆ supply location, reaction temperature, supplied concentration, and fuel/air ratio could affect SF6 decomposition efficiency. The results demonstrate that a 99.9% decomposition efficiency could be achieved in the combustion.

六氟化硫 (SF ₆ ) 广泛用于各种工业过程和商业产品。然而，这种化学性质稳定的气体是导致全球变暖的最有效温室气体 (GHG) 之一。因此，为了减少SF6等温室气体，需要一种新的环保、经济、稳定的处理技术。在这项研究中，使用实验室规模的电子管式炉反应器和基于燃烧的中试系统研究了 SF6 的热分解特性。基于这些结果，SF ₆分解反应级数约为 1，其活化能（E _a) 在调查温度范围内为 238.04–257.18 kJ/mol。该值用于在设计商业设施时计算反应器尺寸。此外，基于燃烧的中试系统的实验结果表明，SF ₆供应位置、反应温度、供应浓度和燃料/空气比会影响 SF 6 分解效率。结果表明，在燃烧中可以达到99.9%的分解效率。