Room-temperature fabrication of functional ceramic films using powder aerosol deposition (AD) is important for practical applications. However, the as-processed ferroelectric films show unusual temperature-dependent dielectric response, including enhanced conductivity in the as-processed state and subsequent significant increase in the permittivity following heat treatment. In this work, we investigate the influence of the residual internal stresses developed during the high-impact consolidation process on the dielectric response. Moreover, the recombination of charged defects generated during deposition is driven by the temperature and the atmospheric condition during the heat treatment as well as the carrier gas type used during deposition. Thermal treatment up to 500 °C in different atmospheres was used to tune the dielectric and ferroelectric response, highlighting that irrespective of the type of carrier gas, AD deposition process induces charged defects in polar oxide ceramics that can be reduced through heat-treatment far-below their bulk sintering temperature. Macroscopic electromechanical properties are contrasted to in-situ heating scanning transmission electron microscopy to observe possible local effects, such as crystallization, grain growth, crystal defect structure, or grain reorientation. In addition X-ray diffraction and X-ray photoelectron spectroscopy studies were conducted to gain insight into the effect of annealing on the crystal structure and local moisture adsorption.

使用粉末气溶胶沉积（AD）在室温下制备功能陶瓷膜对于实际应用很重要。然而，处理后的铁电薄膜表现出不寻常的与温度相关的介电响应，包括处理后的电导率增强以及热处理后介电常数的显着增加。在这项工作中，我们研究了在高冲击固结过程中产生的残余内应力对介电响应的影响。此外，沉积过程中产生的带电缺陷的复合受热处理过程中的温度和大气条件以及沉积过程中使用的载气类型驱动。使用在不同气氛中高达 500 °C 的热处理来调整介电和铁电响应，强调无论载气的类型如何，AD 沉积过程都会在极性氧化物陶瓷中引起带电缺陷，这些缺陷可以通过远距离热处理来减少。低于它们的整体烧结温度。宏观机电特性与原位加热扫描透射电子显微镜观察可能的局部效应，例如结晶、晶粒生长、晶体缺陷结构或晶粒重新取向。此外，还进行了 X 射线衍射和 X 射线光电子能谱研究，以深入了解退火对晶体结构和局部水分吸附的影响。