Microactuators have been playing crucial roles in micromachine technologies because of their small sizes and light weights. The piezoelectric actuation is one of the most important driving methods to perform the motion output with miniature structures. The rotary piezoelectric microactuators are relatively mature, whereas the linear ones need to be further developed. Inspired by the hollowing art, a novel linear piezoelectric microactuator with miniature dimensions of 7.4 mm × 7.4 mm × 10 mm is proposed, which is designed to be an integrated hollow structure without a guide rail and can achieve bidirectional standing-wave drive. The bidirectional motions are achieved by the same first-order bending vibrations of two pairs of thin-walled beams, respectively, which are conducive to the consistency of the forward and backward motions indicate that the maximum velocity, resolution, and maximum thrust force achieved in the forward motion are 19.06 mm/s, 0.3 μm, and 17.45 mN, respectively, whereas those in the backward motion are 16.92 mm/s, 0.45 μm, and 15.28 mN, respectively. The design inspired by the hollowing art has the potential to be an effective and alternative solution for the development of linear piezoelectric microactuators.

中文翻译：

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受空心艺术启发的线性压电微执行器的开发


微执行器因其尺寸小、重量轻而在微机械技术中发挥着至关重要的作用。压电驱动是实现微型结构运动输出的最重要的驱动方法之一。旋转压电微执行器已经相对成熟，而线性压电微执行器还需要进一步发展。受空心艺术的启发，提出了一种新型线性压电微执行器，其微型尺寸为7.4 mm×7.4 mm×10 mm，设计为无导轨的集成空心结构，可实现双向驻波驱动。双向运动分别通过两对薄壁梁相同的一阶弯曲振动来实现，有利于前后运动的一致性，表明在向前运动分别为 19.06 mm/s、0.3 μm 和 17.45 mN，而向后运动分别为 16.92 mm/s、0.45 μm 和 15.28 mN。受镂空艺术启发的设计有可能成为线性压电微执行器开发的有效替代解决方案。