This article presents the integrated design of a robot-based inline measurement system for precise 3-D surface inspection on free-formed objects. The measurement system comprises a MAGLEV measurement platform that is mounted to an industrial robot and enables the out-of-plane tracking of an arbitrarily oriented sample surface. This establishes lab-like conditions for the integrated optical 3-D measurement tool directly in a vibrational environment. Using a proportional-integral-derivative control architecture with a tracking control bandwidth of 600 Hz, the effects of a vibration signal with 15.5 μ\mum rms can be reduced to disturbances with 236 nm rms. The orientation-independent measurement performance is demonstrated by imaging a calibration standard with 20 μ\mum pitch in various robot poses. Experiments show that the system is capable of reducing the axial measurement uncertainty by a factor of 12, enabling robot-based 3-D measurements with submicrometer resolution on freeform surfaces in a vibrational environment.

中文翻译：

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将实验室带入工厂：基于机器人的在线测量系统，可在振动环境中进行精确的 3D 表面检测


本文介绍了基于机器人的在线测量系统的集成设计，用于对自由形状物体进行精确的 3D 表面检测。该测量系统包括安装在工业机器人上的 MAGLEV 测量平台，能够对任意方向的样品表面进行平面外跟踪。这为直接在振动环境中集成光学 3D 测量工具建立了类似实验室的条件。使用跟踪控制带宽为 600 Hz 的比例积分微分控制架构，可将 15.5 μm rms 振动信号的影响降低至 236 nm rms 的干扰。通过对各种机器人姿势下具有 20 μm 节距的校准标准进行成像，证明了与方向无关的测量性能。实验表明，该系统能够将轴向测量不确定度降低 12 倍，从而能够在振动环境中的自由曲面上进行基于机器人的 3D 测量，分辨率达到亚微米级。