The coplanar waveguide (CPW) microwave resonators have been widely applied for solid-state quantum computation and single-photon detection. Based on the physical analysis for the high fidelity readouts of the qubit(s), in this paper we design and then fabricate accordingly the desired aluminum (Al) film quarter-wavelength resonators on sapphire substrates. The ultra-low temperature measurement results show that the linearity of the internal quality factor under the proper driving power is satisfied well for the high fidelity readouts of the qubit(s); and the phase- and amplitude fractional frequency noises are significantly less for avoiding the potential information false alarms of the detected qubit during the readouts. With the demonstrated qubit-resonator experimental parameters, we argue that the designed and fabricated quarter-wavelength CPW resonators, with optimized parameters, can be used to implement the desired weakly perturbing readout measurements of the solid-state qubits on-chip.

中文翻译：

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用于量子位读数的蓝宝石上的低损耗超导铝微波共面波导谐振器

共面波导（CPW）微波谐振器已广泛应用于固态量子计算和单光子检测。基于对量子位的高保真读出的物理分析，在本文中，我们设计并相应地在蓝宝石衬底上制造所需的铝 (Al) 薄膜四分之一波长谐振器。超低温测量结果表明，在适当的驱动功率下，内部品质因数的线性度可以很好地满足量子比特的高保真读出；并且相位和振幅分数频率噪声显着减少，以避免在读出期间检测到的量子位的潜在信息误报。通过演示的量子比特谐振器实验参数，