Self-Expanding Molten Salt-Driven Growth of Patterned Transition-Metal Dichalcogenide Crystals,Journal of the American Chemical Society

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Self-Expanding Molten Salt-Driven Growth of Patterned Transition-Metal Dichalcogenide Crystals
Journal of the American Chemical Society ( IF 14.4 ) Pub Date : 2022-05-04 , DOI: 10.1021/jacs.2c02518
Dingding Jiang _{1,

2} , Xuejun Wang _{1,

2} , Renzhong Chen _{1,

2} , Jiang Sun _{1,

2} , Hua Kang _{1,

2} , Daizong Ji _{1,

2} , Yunqi Liu _{1,

3} , Dacheng Wei _{1,

2}

Affiliation

Transition-metal dichalcogenides (TMDs) have been considered potential materials for the next generation of semiconductors. Realizing controllable growth of TMD crystals is a prerequisite for their future applications, which remains challenging. Here, we reveal a new mechanism of self-expanding molten salt-driven growth for a salt-assisted method and achieve the patterned growth of TMD single-crystal arrays with a size of hundreds of micrometers. Time-of-flight secondary ion mass spectroscopy and other spectroscopy characterizations identify the component of the molten salt solution. Microscopic characterizations reveal the existence of salt solution as an interlayer between a TMD monolayer and the silicon substrate as well as particles along the crystal edge. The edged salt solution serves as a self-expanding liquid substrate, which confines the reactive sites to the localized liquid surface, thus avoiding random nucleation. The surface reaction also assures monolayer crystal formation due to self-limiting growth. Besides, the liquid substrate affords sources and spreads itself continuously owing to the nonwetting effect on TMD crystals, thereby facilitating the continuous extension of the TMD monolayer. This work provides novel insights into the controllable synthesis of TMD monolayers and paves the way for the fabrication of TMD-based integrated functional devices.

中文翻译：

图案化过渡金属二硫属化物晶体的自膨胀熔盐驱动生长

过渡金属二硫化物 (TMD) 已被认为是下一代半导体的潜在材料。实现 TMD 晶体的可控生长是其未来应用的先决条件，这仍然具有挑战性。在这里，我们揭示了一种盐辅助方法的自膨胀熔盐驱动生长的新机制，并实现了数百微米尺寸的 TMD 单晶阵列的图案化生长。飞行时间二次离子质谱和其他光谱表征识别熔盐溶液的成分。微观表征揭示了盐溶液作为 TMD 单层和硅衬底之间的夹层以及沿晶体边缘的颗粒的存在。边缘盐溶液用作自膨胀液体基质，它将反应位点限制在局部液体表面，从而避免随机成核。由于自限生长，表面反应还确保了单层晶体的形成。此外，由于对TMD晶体的非润湿作用，液体基板提供了来源并不断扩展自身，从而促进了TMD单层的连续延伸。这项工作为 TMD 单层的可控合成提供了新的见解，并为制造基于 TMD 的集成功能器件铺平了道路。从而促进TMD单层的连续延伸。这项工作为 TMD 单层的可控合成提供了新的见解，并为制造基于 TMD 的集成功能器件铺平了道路。从而促进TMD单层的连续延伸。这项工作为 TMD 单层的可控合成提供了新的见解，并为制造基于 TMD 的集成功能器件铺平了道路。

更新日期：2022-05-04

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